Invention Grant
- Patent Title: Method for directed self-assembly (DSA) of block copolymers
- Patent Title (中): 嵌段共聚物的定向自组装方法(DSA)
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Application No.: US14067769Application Date: 2013-10-30
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Publication No.: US09054043B2Publication Date: 2015-06-09
- Inventor: He Gao , Ricardo Ruiz , Lei Wan
- Applicant: HGST Netherlands B.V.
- Applicant Address: NL Amsterdam
- Assignee: HGST Netherlands B.V.
- Current Assignee: HGST Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Agent Thomas R. Berthold
- Main IPC: G03F7/26
- IPC: G03F7/26 ; H01L21/308

Abstract:
In directed self-assembly (DSA) of a block copolymer (BCP), a patterned sublayer on a substrate serves as a guiding chemical prepattern on which BCPs form more uniform and/or denser patterns. A layer of a blend of a BCP and functional homopolymers, referred to as inks, is deposited on the patterned sublayer and annealed to change the initial chemical prepattern to a 1:1-like chemical pattern that is more favorable to DSA. After annealing, the inks selectively distribute into blocks by DSA, and part of the inks graft on the substrate underneath the blocks. The BCP blend layer is then rinsed away, leaving the grafted inks A second layer of BCP is then deposited and annealed as a second DSA step to form alternating lines of the BCP components. One of the BCP components is removed, leaving lines of the other BCP component as a mask for patterning the substrate.
Public/Granted literature
- US20150118851A1 METHOD FOR DIRECTED SELF-ASSEMBLY (DSA) OF BLOCK COPOLYMERS Public/Granted day:2015-04-30
Information query
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