Invention Grant
- Patent Title: Method for performing hot water seal on electrostatic chuck
- Patent Title (中): 在静电吸盘上进行热水密封的方法
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Application No.: US13219540Application Date: 2011-08-26
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Publication No.: US09054148B2Publication Date: 2015-06-09
- Inventor: Hong Shih , Tuochuan Huang , David Schaefer , Ambarish Chhatre , John Daugherty , MingHang Wu , Clifford La Croix
- Applicant: Hong Shih , Tuochuan Huang , David Schaefer , Ambarish Chhatre , John Daugherty , MingHang Wu , Clifford La Croix
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: B05D5/12
- IPC: B05D5/12 ; H01L21/683 ; B05D7/00 ; C23C22/66 ; C23C8/02
Abstract:
A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.
Public/Granted literature
- US20130052339A1 SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK Public/Granted day:2013-02-28
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