Invention Grant
US09063424B2 Isocyanurate compound for forming organic anti-reflective layer and composition including same
有权
用于形成有机抗反射层的异氰脲酸酯化合物及包含其的组合物
- Patent Title: Isocyanurate compound for forming organic anti-reflective layer and composition including same
- Patent Title (中): 用于形成有机抗反射层的异氰脲酸酯化合物及包含其的组合物
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Application No.: US13393682Application Date: 2010-09-14
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Publication No.: US09063424B2Publication Date: 2015-06-23
- Inventor: Hyo-Jung Roh , Dong-Kyu Ju , Hyun-Jin Kim , Deog-Bae Kim
- Applicant: Hyo-Jung Roh , Dong-Kyu Ju , Hyun-Jin Kim , Deog-Bae Kim
- Applicant Address: KR Incheon
- Assignee: DONGJIN SEMICHEM CO., LTD.
- Current Assignee: DONGJIN SEMICHEM CO., LTD.
- Current Assignee Address: KR Incheon
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: KR10-2009-0086352 20090914
- International Application: PCT/KR2010/006281 WO 20100914
- International Announcement: WO2011/031123 WO 20110317
- Main IPC: G03F7/09
- IPC: G03F7/09 ; C07D251/06 ; C08L81/00 ; H01L31/0216 ; C08F283/00 ; C08G75/00 ; C08K5/00 ; B05D3/02 ; G03F7/16 ; H01L21/02 ; H01L21/4757 ; H01L21/027 ; C08K5/42

Abstract:
An isocyanurate compound for forming an organic anti-reflective coating layer, which has superior stability and etch rate at a high temperature, and which has a high refractive index, is represented by following Formula 1. In Formula 1, R is independently a hydrogen atom or a methyl group, R1 is independently a chain type or ring type saturated or unsaturated hydrocarbyl group of 1 to 15 carbon atoms containing 0 to 6 of hetero atoms, and R2 independently a chain type or ring type saturated or unsaturated hydrocarbyl group of 1 to 15 carbon atoms containing 0 to 15 of hetero atoms, wherein, R1 can have at least two bonding parts, and in the case that R1 has at least two bonding parts, the rest parts except R1 of the compounds represented by Formula 1 can connect to the R1 to form a polymer structure.
Public/Granted literature
- US20120164338A1 ISOCYANURATE COMPOUND FOR FORMING ORGANIC ANTI-REFLECTIVE LAYER AND COMPOSITION INCLUDING SAME Public/Granted day:2012-06-28
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