Invention Grant
- Patent Title: Test structure for wafer acceptance test and test process for probecard needles
- Patent Title (中): 晶圆验收测试结果和针尖针试验过程
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Application No.: US13645789Application Date: 2012-10-05
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Publication No.: US09075103B2Publication Date: 2015-07-07
- Inventor: Qiong Wu , Chien-Ming Lan
- Applicant: Qiong Wu , Chien-Ming Lan
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R35/00 ; G01R1/073

Abstract:
Provided is a test structure for wafer acceptance test (WAT). The test structure includes a row of a plurality of first pads electrically connecting to each other, a second pad, a third pad, a first peripheral metal line, and a second peripheral metal line. The second pad is disposed in the vicinity of a first end of the row, wherein the second pad is electrically disconnected to the first pads. The third pad is disposed in the vicinity of a second end of the row, wherein the third pad is electrically disconnected to the first pads. The first peripheral metal line is disposed at a first side of the row and electrically connected to the second pad. The second peripheral metal line is disposed at a second side of the row and electrically connected to the third pad.
Public/Granted literature
- US20140097862A1 TEST STRUCTURE FOR WAFER ACCEPTANCE TEST AND TEST PROCESS FOR PROBECARD NEEDLES Public/Granted day:2014-04-10
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