Invention Grant
- Patent Title: Phase plate
- Patent Title (中): 相板
-
Application No.: US13726260Application Date: 2012-12-24
-
Publication No.: US09076562B2Publication Date: 2015-07-07
- Inventor: Arthur Blackburn
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker & Botts L.L.P.
- Priority: EP12153378 20120131
- Main IPC: G21K5/04
- IPC: G21K5/04 ; G21K5/02 ; H01J37/26 ; G21K1/08 ; H01J37/147 ; B82B1/00
Abstract:
A phase plate for a charged particle beam system, such as a transmission electron microscope (TEM), is described. The phase plate comprises a support having a through-hole and an elongate member which is magnetisable in a direction along its length and which extends partially across the through-hole and which is narrower than the through-hole.
Public/Granted literature
- US20130193322A1 PHASE PLATE Public/Granted day:2013-08-01
Information query
