A blanking device for multiple charged particle beams includes plural shift registers, arranged in two dimensions, to form plural groups each including shift registers, connected in series, of the plural shift registers, plural blankers to respectively provide a blanking deflection to a corresponding beam of multiple beams each controlled through a corresponding shift register in the plural shift registers, plural serial parallel conversion units, arranged along the four sides of a quadrangular region which surrounds the whole of the plural shift registers, to be respectively connected by parallel wiring to at least one of the plural groups, and plural pads, arranged along the four sides of the quadrangular region, to be respectively in combination with a corresponding serial parallel conversion unit of the plural serial parallel conversion units such that each of the plural pads is connected by single wiring to the corresponding serial parallel conversion unit.