Invention Grant
- Patent Title: Sample holder and method for fixing observation sample
- Patent Title (中): 样品架和固定观察样品的方法
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Application No.: US14405485Application Date: 2013-05-30
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Publication No.: US09082583B2Publication Date: 2015-07-14
- Inventor: Kazuhiro Koyama , Masahiro Akatsu
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2012-128766 20120606
- International Application: PCT/JP2013/065065 WO 20130530
- International Announcement: WO2013/183543 WO 20131212
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26 ; G21K5/08 ; H01J37/28

Abstract:
A sample holder is provided allowing for favorable observation of a cross-sectional sample using a retarding method. The sample holder includes: a sample placement member on which a first fixing member, a cross-sectional sample as an observation sample, and a second fixing member are placed in contact with each other, and inserted inside the electronic optical lens barrel of an electron microscope; and a voltage introduction means for introducing a voltage to the sample placement member. The sample placement member has a positioning section for positioning the first fixing member, the cross-sectional sample, and the second fixing member onto a placement position. A positioning section positions the first planar surface of the first fixing member and the second planar surface of the second fixing member which are disposed respectively adjacent to the observation surface of the cross-sectional sample, parallel to the observation surface at locations equidistant from the observation surface.
Public/Granted literature
- US20150137002A1 Holder and Method for Fixing Observation Sample Public/Granted day:2015-05-21
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