Invention Grant
- Patent Title: Emitter, gas field ion source, and ion beam device
- Patent Title (中): 发射体，气体离子源和离子束装置
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Application No.: US14238718Application Date: 2012-06-20
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Publication No.: US09087675B2Publication Date: 2015-07-21
- Inventor: Yoshimi Kawanami , Hironori Moritani , Hiroyuki Muto
- Applicant: Yoshimi Kawanami , Hironori Moritani , Hiroyuki Muto
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2011-192272 20110905
- International Application: PCT/JP2012/065676 WO 20120620
- International Announcement: WO2013/035411 WO 20130314
- Main IPC: G21K5/04
- IPC: G21K5/04 ; H01J37/26 ; H01J37/08 ; H01J9/50
Abstract:
Provided is an ion source emitter that does not cause significant extraction voltage changes even when an apex portion of the emitter is repeatedly regenerated. The emitter has a shape of a triangular pyramid with the single atom at the apex. An apex portion of the emitter is substantially shaped like a hexagon when viewed from the apex side.
Public/Granted literature
- US20140191128A1 EMITTER, GAS FIELD ION SOURCE, AND ION BEAM DEVICE Public/Granted day:2014-07-10
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