Invention Grant
- Patent Title: Variable capacitance device
- Patent Title (中): 可变电容器件
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Application No.: US14249890Application Date: 2014-04-10
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Publication No.: US09087929B2Publication Date: 2015-07-21
- Inventor: Yoshihiro Konaka , Toshiya Kawate
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto-fu
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto-fu
- Agency: Studebaker & Brackett PC
- Priority: JP2011-244139 20111108
- Main IPC: H01L29/93
- IPC: H01L29/93 ; H01L21/00 ; H01G5/16 ; H01L49/02 ; B81C1/00 ; H01L23/64
Abstract:
A variable capacitance device includes a fixed substrate, a movable portion, driving electrodes, an RF capacitance electrode and an insulating film. The movable portion faces the fixed substrate and can change a gap between the movable portion and the fixed substrate. The driving electrodes are formed on the fixed substrate so as to face the movable portion. The RF capacitance electrode is formed on the fixed substrate so as to face the movable portion and be spaced apart from the driving electrodes. The insulating film is formed between the movable portion and the driving electrodes. The level of a voltage applied to the driving electrodes and the level of a voltage applied to the movable portion are periodically switched and the level of a voltage applied to the RF capacitance electrode and the level of a voltage applied to the movable portion are always the same.
Public/Granted literature
- US20140217552A1 VARIABLE CAPACITANCE DEVICE Public/Granted day:2014-08-07
Information query
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