公开(公告)号：US09087929B2

公开(公告)日：2015-07-21

申请号：US14249890

申请日：2014-04-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshihiro Konaka ,  Toshiya Kawate

IPC: H01L29/93 ,  H01L21/00 ,  H01G5/16 ,  H01L49/02 ,  B81C1/00 ,  H01L23/64

CPC classification number: H01L29/93 ,  B81B2201/0221 ,  B81C1/00976 ,  H01G5/16 ,  H01L23/642 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A variable capacitance device includes a fixed substrate, a movable portion, driving electrodes, an RF capacitance electrode and an insulating film. The movable portion faces the fixed substrate and can change a gap between the movable portion and the fixed substrate. The driving electrodes are formed on the fixed substrate so as to face the movable portion. The RF capacitance electrode is formed on the fixed substrate so as to face the movable portion and be spaced apart from the driving electrodes. The insulating film is formed between the movable portion and the driving electrodes. The level of a voltage applied to the driving electrodes and the level of a voltage applied to the movable portion are periodically switched and the level of a voltage applied to the RF capacitance electrode and the level of a voltage applied to the movable portion are always the same.

Abstract translation: 可变电容器件包括固定衬底，可动部分，驱动电极，RF电容电极和绝缘膜。 可移动部分面向固定基板并且可以改变可移动部分和固定基板之间的间隙。 驱动电极形成在固定基板上以面对可动部分。 RF电容电极形成在固定基板上，以面对可动部分并与驱动电极间隔开。 绝缘膜形成在可动部和驱动电极之间。 施加到驱动电极的电压的电平和施加到可动部分的电压的电平被周期性地切换，并且施加到RF电容电极的电压的电平和施加到可动部分的电压的电平总是 相同。

公开(公告)号：US09350073B2

公开(公告)日：2016-05-24

申请号：US13937026

申请日：2013-07-08

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Kazunari Kawahata ,  Hiroshi Nishida ,  Hiroshi Nishikawa ,  Toshiya Kawate

IPC: H01Q1/50 ,  H01Q5/00 ,  H01Q5/321 ,  H04B1/04 ,  B81B7/02 ,  H04W52/02 ,  H01Q5/335

CPC classification number: H01Q1/50 ,  B81B7/02 ,  H01Q5/321 ,  H01Q5/335 ,  H04B1/0458 ,  H04W52/0209 ,  Y02D70/1262 ,  Y02D70/40

Abstract: Provided is a MEMS module that includes a MEMS element having a first capacitor electrode that can be displaced, a second capacitor electrode that opposes the first capacitor electrode, and driving electrodes that cause the first capacitor electrode to be displaced. The driving electrodes are connected to a control unit that applies a driving voltage to the driving electrodes and monitor terminals for detecting power. Thus, an element for monitoring power is not needed and a MEMS module, a variable reactance circuit and an antenna device are provided that are capable of realizing smaller size and lower loss.

Abstract translation: 提供了一种MEMS模块，其包括具有可移位的第一电容器电极的MEMS元件，与第一电容器电极相对的第二电容器电极以及使第一电容器电极移位的驱动电极。 驱动电极连接到向驱动电极施加驱动电压的控制单元和用于检测电力的监视端子。 因此，不需要用于监视功率的元件，并且提供能够实现更小尺寸和更低损耗的MEMS模块，可变电抗电路和天线装置。