Invention Grant
US09095874B2 Method and apparatus for curing thin films on low-temperature substrates at high speeds 有权
用于在低温基板上高速固化薄膜的方法和装置

Method and apparatus for curing thin films on low-temperature substrates at high speeds
Abstract:
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.
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