Invention Grant
- Patent Title: Method and apparatus for curing thin films on low-temperature substrates at high speeds
- Patent Title (中): 用于在低温基板上高速固化薄膜的方法和装置
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Application No.: US14171298Application Date: 2014-02-03
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Publication No.: US09095874B2Publication Date: 2015-08-04
- Inventor: Kurt A Schroder , Karl M Martin , Doug K. Jackson , Steven C McCool
- Applicant: NCC NANO, LLC
- Applicant Address: US TX Dallas
- Assignee: NCC NANO, LLC
- Current Assignee: NCC NANO, LLC
- Current Assignee Address: US TX Dallas
- Agency: Russell Ng PLLC
- Agent Anthony P. Ng
- Main IPC: H05B41/14
- IPC: H05B41/14 ; B05D3/06 ; F26B3/34 ; H05B41/34 ; H05K3/12 ; H05K1/09

Abstract:
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.
Public/Granted literature
- US20140145092A1 METHOD AND APPARATUS FOR CURING THIN FILMS ON LOW-TEMPERATURE SUBSTRATES AT HIGH SPEEDS Public/Granted day:2014-05-29
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