Invention Grant
- Patent Title: Floating sheet production apparatus and method
- Patent Title (中): 浮板生产设备及方法
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Application No.: US12948248Application Date: 2010-11-17
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Publication No.: US09112064B2Publication Date: 2015-08-18
- Inventor: Peter L. Kellerman , Frank Sinclair
- Applicant: Peter L. Kellerman , Frank Sinclair
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: C30B15/30
- IPC: C30B15/30 ; H01L31/02 ; C30B15/06 ; C30B15/14 ; C30B28/10 ; C30B29/06
Abstract:
This sheet production apparatus comprises a vessel defining a channel configured to hold a melt. The melt is configured to flow from a first point to a second point of the channel. A cooling plate is disposed proximate the melt and is configured to form a sheet on the melt. A spillway is disposed at the second point of the channel. This spillway is configured to separate the sheet from the melt.
Public/Granted literature
- US20110117234A1 FLOATING SHEET PRODUCTION APPARATUS AND METHOD Public/Granted day:2011-05-19
Information query
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