Invention Grant
- Patent Title: Axial magnetic ion source and related ionization methods
- Patent Title (中): 轴向磁离子源及相关电离方法
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Application No.: US13925623Application Date: 2013-06-24
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Publication No.: US09117617B2Publication Date: 2015-08-25
- Inventor: Charles William Russ, IV , Harry F. Prest , Jeffrey T. Kernan
- Applicant: Agilent Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H05B31/26 ; H01J27/02 ; H01J27/20 ; H01J49/14

Abstract:
An ion source is configured for electron ionization and produces coaxial electron and ion beams. The ion source includes an ionization chamber along an axis, a magnet assembly configured for generating an axial magnetic field in the ionization chamber, an electron source, and a lens assembly configured for directing the ion beam out from the ionization chamber along the axis, reflecting the electron beam back toward the electron source, and transmitting higher energy ions out from the ion source while reflecting lower energy ions toward a lens element for neutralization.
Public/Granted literature
- US20140375209A1 AXIAL MAGNETIC ION SOURCE AND RELATED IONIZATION METHODS Public/Granted day:2014-12-25
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