A method of making a doped metal oxide includes heating a first doped metal oxide by rapid thermal annealing, to form a second doped metal oxide. The crystal structure of the second doped metal oxide is different from the crystal structure of the first doped metal oxide. The method may provide a doped titanium oxide, where the atomic ratio of dopant nonmetal to titanium is from 2% to 20%, and at least 10% of the doped titanium oxide is in the rutile phase. The method also can provide a doped tin oxide, where the atomic ratio of dopant nonmetal to tin is from 2% to 20%, and at least 50% of 900 the doped tin oxide is in the rutile phase.