Invention Grant
- Patent Title: Scan method
- Patent Title (中): 扫描方式
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Application No.: US13237426Application Date: 2011-09-20
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Publication No.: US09123502B2Publication Date: 2015-09-01
- Inventor: Billy W. Ward
- Applicant: Billy W. Ward
- Applicant Address: US NY Thornwood
- Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee Address: US NY Thornwood
- Agency: Fish & Richardson P.C.
- Main IPC: H04N7/18
- IPC: H04N7/18 ; H01J37/26 ; H01J37/28
Abstract:
In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.
Public/Granted literature
- US20120057015A1 SCAN METHOD Public/Granted day:2012-03-08
Information query
