Invention Grant
- Patent Title: Film forming apparatus
- Patent Title (中): 成膜装置
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Application No.: US13347110Application Date: 2012-01-10
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Publication No.: US09127358B2Publication Date: 2015-09-08
- Inventor: Mitsuya Inoue , Yasunori Kumagai , Kippei Sugita
- Applicant: Mitsuya Inoue , Yasunori Kumagai , Kippei Sugita
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2011-006057 20110114
- Main IPC: H01L21/306
- IPC: H01L21/306 ; C23F1/00 ; C23C16/448 ; C23C14/54 ; C23C16/455 ; C23C16/52 ; H01L21/02 ; B05D1/00

Abstract:
A film forming apparatus for forming a polyimide film on a substrate installed within a film forming container. The apparatus includes: a first vaporizer configured to vaporize a first raw material in a solid state, and supply the vaporized first raw material gas to the substrate; a second vaporizer configured to vaporize a second raw material in a liquid state, and supply the vaporized second raw material gas to the substrate; a first pressure measurement unit configured to measure the internal pressure of the first vaporizer; a second pressure measurement unit configured to measure the internal pressure of the second vaporizer; and a controller configured to calculate a supply amount of the first and second raw material gases by the first and second pressure measurement units, respectively, and control the first and second vaporizers to supply the first and second raw material gases in a uniform amount.
Public/Granted literature
- US20120180719A1 FILM FORMING APPARATUS Public/Granted day:2012-07-19
Information query
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