Invention Grant
- Patent Title: Wafer level spectrometer
- Patent Title (中): 晶圆级光谱仪
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Application No.: US13491442Application Date: 2012-06-07
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Publication No.: US09140604B2Publication Date: 2015-09-22
- Inventor: Earl Jensen , Mei Sun , Kevin O'Brien
- Applicant: Earl Jensen , Mei Sun , Kevin O'Brien
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: G01J3/46
- IPC: G01J3/46 ; G01J1/58 ; G01J3/02 ; G01J3/36 ; G01J3/12

Abstract:
A sensor apparatus for measuring characteristics of optical radiation has a substrate and a low profile spectrally selective detection system located within the substrate at one or more spatially separated locations. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Public/Granted literature
- US20120318966A1 WAFER LEVEL SPECTROMETER Public/Granted day:2012-12-20
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