Invention Grant
US09150413B2 Waveguide-integrated plasmonic resonator for integrated SERS measurements
有权
用于集成SERS测量的波导集成等离子体振子
- Patent Title: Waveguide-integrated plasmonic resonator for integrated SERS measurements
- Patent Title (中): 用于集成SERS测量的波导集成等离子体振子
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Application No.: US13471254Application Date: 2012-05-14
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Publication No.: US09150413B2Publication Date: 2015-10-06
- Inventor: Pol Van Dorpe , Pieter Neutens
- Applicant: Pol Van Dorpe , Pieter Neutens
- Applicant Address: BE Leuven BE Leuven
- Assignee: IMEC,Katholieke Universiteit Leuven, K.U. Leuven R&D
- Current Assignee: IMEC,Katholieke Universiteit Leuven, K.U. Leuven R&D
- Current Assignee Address: BE Leuven BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: G01J3/44
- IPC: G01J3/44 ; B82Y10/00 ; B82Y20/00 ; G02B6/122 ; G01N21/65
Abstract:
A resonator structure is disclosed. In some embodiments, the resonator structure may include a metal-insulator-metal waveguide comprising a first metal layer, a second metal layer, and an insulating layer between the first metal layer and the second metal layer, wherein the insulating layer comprises a resonating cavity. The resonator structure may further include a mirror formed in the resonating cavity, wherein the mirror comprises at least one nanoscale metallic reflector positioned at least partly in the insulating layer.
Public/Granted literature
- US20120287429A1 Waveguide-Integrated Plasmonic Resonator for Integrated SERS Measurements Public/Granted day:2012-11-15
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