Invention Grant
US09157802B2 System for real-time analysis of material distribution in CIGS thin film using laser-induced breakdown spectroscopy
有权
使用激光诱导击穿光谱法实时分析CIGS薄膜中材料分布的系统
- Patent Title: System for real-time analysis of material distribution in CIGS thin film using laser-induced breakdown spectroscopy
- Patent Title (中): 使用激光诱导击穿光谱法实时分析CIGS薄膜中材料分布的系统
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Application No.: US13325840Application Date: 2011-12-14
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Publication No.: US09157802B2Publication Date: 2015-10-13
- Inventor: Sungho Jeong , Seokhee Lee , Hee-Sang Shim
- Applicant: Sungho Jeong , Seokhee Lee , Hee-Sang Shim
- Applicant Address: KR Buk-Gu, Gwangju
- Assignee: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Buk-Gu, Gwangju
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Main IPC: G01J3/443
- IPC: G01J3/443 ; G01N21/71

Abstract:
The present invention relates to a process control system which can measure the physical properties of a CIGS thin film in real-time in a continuous production line of a CIGS thin film solar cell, more specifically to a system for real-time analysis of material distribution of a CIGS thin film comprising: a header, which comprises a laser irradiation unit producing plasma from the CIGS thin film by irradiating a laser beam to a part of the CIGS thin film; and a spectrum detection optical unit detecting a spectrum generated from the plasma; a transfer unit, which transfers the header at the same rate and to the direction with the transfer rate and direction of the CIGS thin film; and a spectrum analysis unit, which analyzes the spectrum detected by the spectrum detection optical unit.
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