Invention Grant
- Patent Title: Aluminum dopant compositions, delivery package and method of use
- Patent Title (中): 铝掺杂剂组合物，递送包装和使用方法
-
Application No.: US14287840Application Date: 2014-05-27
-
Publication No.: US09165773B2Publication Date: 2015-10-20
- Inventor: Ashwini K. Sinha , Lloyd A. Brown
- Applicant: Ashwini K. Sinha , Lloyd A. Brown
- Applicant Address: US CT Danbury
- Assignee: PRAXAIR TECHNOLOGY, INC.
- Current Assignee: PRAXAIR TECHNOLOGY, INC.
- Current Assignee Address: US CT Danbury
- Agent Nilay S. Dalal
- Main IPC: H01L21/265
- IPC: H01L21/265 ; H01L21/67 ; H01J37/08 ; H01J37/317
Abstract:
A novel method and system for using aluminum dopant compositions is provided. A composition of the aluminum dopant compositions is selected with sufficient vapor pressure and minimal carbon content, thereby enabling ease of delivery to an ion implant process and substantial reduction of carbon deposition during Al ion implantation. The source material is preferably stored and delivered from a sub-atmospheric storage and delivery device to enhance safety and reliability during the Al ion implantation process.
Public/Granted literature
- US20140357069A1 ALUMINUM DOPANT COMPOSITIONS, DELIVERY PACKAGE AND METHOD OF USE Public/Granted day:2014-12-04
Information query
IPC分类:
