Invention Grant
- Patent Title: Micromachined gyroscope including a guided mass system
- Patent Title (中): 微机械陀螺仪包括引导质量系统
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Application No.: US14041810Application Date: 2013-09-30
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Publication No.: US09170107B2Publication Date: 2015-10-27
- Inventor: Ozan Anac , Joseph Seeger
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Sawyer Law Group, P.C.
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/574 ; G01C19/5712

Abstract:
A gyroscope comprises a substrate and a guided mass system. The guided mass system comprises proof masses and guiding arms disposed in a plane parallel to the substrate. The proof masses are coupled to the guiding arm by springs. The guiding arm is coupled to the substrate by springs. At least one of the proof-masses is directly coupled to the substrate by at least one anchor via a spring system. The gyroscope also comprises an actuator for vibrating one of the proof-masses in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.
Public/Granted literature
- US20140026662A1 MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM Public/Granted day:2014-01-30
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