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    Gyroscope self test by applying rotation on Coriolis sense mass
    1.
    发明授权
    Gyroscope self test by applying rotation on Coriolis sense mass 有权

    公开(公告)号：US10415994B2

    公开(公告)日：2019-09-17

    申请号：US15644534

    申请日：2017-07-07

    Applicant: Invensense, Inc.

    Inventor： Ozan Anac ,  Joseph Seeger

    IPC: G01C25/00 ,  G01C19/56 ,  G01C19/574 ,  G01C19/5712

    Abstract: A self-test method by rotating the proof mass at a high frequency enables testing the functionality of both the drive and sense systems at the same time. In this method, the proof mass is rotated at a drive frequency. An input force which is substantially two times the drive frequency is applied to the actuation structures to rotate the proof mass of the gyroscope around the sensitive axis orthogonal to the drive axis. An output response of the gyroscope at the drive frequency is detected by a circuitry and a self-test response is obtained.

    Configuration to reduce non-linear motion
    2.
    发明授权
    Configuration to reduce non-linear motion 有权

    公开(公告)号：US11047685B2

    公开(公告)日：2021-06-29

    申请号：US16735351

    申请日：2020-01-06

    Applicant: INVENSENSE, INC.

    Inventor： Ozan Anac ,  Joseph Seeger

    IPC: G01C19/5762 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/08 ,  B81B3/00

    Abstract: Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

    Micromachined gyroscope including a guided mass system
    3.
    发明授权
    Micromachined gyroscope including a guided mass system 有权

    公开(公告)号：US09291456B2

    公开(公告)日：2016-03-22

    申请号：US14472143

    申请日：2014-08-28

    Applicant: InvenSense, Inc.

    Inventor： Joseph Seeger ,  Ozan Anac

    IPC: G01C19/00 ,  G01C19/5733 ,  G01C19/574 ,  G01C19/5755 ,  G01C19/5712

    Abstract: A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.

    MEMS sensor with decoupled drive system
    4.
    发明授权
    MEMS sensor with decoupled drive system 有权

    公开(公告)号：US09863769B2

    公开(公告)日：2018-01-09

    申请号：US14678774

    申请日：2015-04-03

    Applicant: InvenSense, Inc.

    Inventor： Ozan Anac ,  Joseph Seeger

    IPC: G01C19/5712 ,  G01C19/56 ,  G01C19/5747 ,  G01C19/42 ,  G01C15/14

    CPC classification number: G01C19/5712

    Abstract: In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements.

    GYROSCOPE SELF TEST BY APPLYING ROTATION ON CORIOLIS SENSE MASS
    5.
    发明申请
    GYROSCOPE SELF TEST BY APPLYING ROTATION ON CORIOLIS SENSE MASS 有权
    通过对CORIOLIS SENSE MASS进行旋转自动测试

    公开(公告)号：US20130233048A1

    公开(公告)日：2013-09-12

    申请号：US13862352

    申请日：2013-04-12

    Applicant: INVENSENSE, INC.

    Inventor： Ozan Anac ,  Joseph Seeger

    IPC: G01C25/00

    CPC classification number: G01C25/00 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/574 ,  G01C25/005

    Abstract: A self-test method by rotating the proof mass at a high frequency enables testing the functionality of both the drive and sense systems at the same time. In this method, the proof mass is rotated at a drive frequency. An input force which is substantially two times the drive frequency is applied to the actuation structures to rotate the proof mass of the gyroscope around the sensitive axis orthogonal to the drive axis. An output response of the gyroscope at the drive frequency is detected by a circuitry and a self-test response is obtained.

    Abstract translation: 通过以高频率旋转检测质量的自检方法，可以同时测试驱动和感测系统的功能。 在该方法中，检测质量以驱动频率旋转。 基本上是驱动频率的两倍的输入力被施加到致动结构，以使陀螺仪的检测质量块围绕与驱动轴正交的敏感轴线旋转。 通过电路检测陀螺仪在驱动频率下的输出响应，并获得自检响应。

    MEMS device with improved spring system
    8.
    发明授权
    MEMS device with improved spring system 有权

    公开(公告)号：US10551193B2

    公开(公告)日：2020-02-04

    申请号：US15866140

    申请日：2018-01-09

    Applicant: INVENSENSE, INC.

    Inventor： Joseph Seeger ,  Ozan Anac

    IPC: G01C19/5755 ,  G01C19/5733

    Abstract: A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.

    Configuration to reduce non-linear motion
    9.
    发明授权
    Configuration to reduce non-linear motion 有权

    公开(公告)号：US10527421B2

    公开(公告)日：2020-01-07

    申请号：US15814373

    申请日：2017-11-15

    Applicant: INVENSENSE, INC.

    Inventor： Ozan Anac ,  Joseph Seeger

    IPC: G01C19/5762 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/08 ,  B81B3/00

    Abstract: Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

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