Invention Grant
- Patent Title: Force detection device, and force transducer device
- Patent Title (中): 力检测装置，力传感器装置
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Application No.: US14220093Application Date: 2014-03-19
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Publication No.: US09171965B2Publication Date: 2015-10-27
- Inventor: Kazuma Takenaka
- Applicant: YOKOGAWA ELECTRIC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Hauptman Ham, LLP
- Priority: JP2013-090884 20130424
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G01L5/16 ; G01L9/00 ; G01L9/06 ; G01L1/16 ; G01L1/18 ; H01L29/16
Abstract:
A force detection device includes a diamond piezoresistor including a highly orientated diamond into which boron is introduced as an impurity. The absolute value of the piezoresistance coefficient of the diamond piezoresistor is greater than the absolute value of a piezoresistance coefficient π11 or π12 in a case in which a major axis is in the direction.
Public/Granted literature
- US20140319538A1 FORCE DETECTION DEVICE, AND FORCE TRANSDUCER DEVICE Public/Granted day:2014-10-30
Information query
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