Invention Grant
US09176030B2 Substrate and target plate 有权
基板和靶板

Substrate and target plate
Abstract:
A substrate is provided, which comprises a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, wherein at least two dimensions are between 1 nm and 100 μm, the structured surface being configured to stimulate smooth crystallization of microcrystals or to boost hydrophobic properties. A target plate comprising a plurality of substrates is disclosed as well.
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