Invention Grant
- Patent Title: Substrate and target plate
- Patent Title (中): 基板和靶板
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Application No.: US12408082Application Date: 2009-03-20
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Publication No.: US09176030B2Publication Date: 2015-11-03
- Inventor: Ivan Lucic , Peter Hausberger , Werner Balika , Christian Poeschl
- Applicant: Ivan Lucic , Peter Hausberger , Werner Balika , Christian Poeschl
- Applicant Address: AT Anif
- Assignee: SONY DADC Austria AG
- Current Assignee: SONY DADC Austria AG
- Current Assignee Address: AT Anif
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: EP08006553 20080331
- Main IPC: B32B3/00
- IPC: B32B3/00 ; G01N1/28 ; B01L3/00 ; H01J49/04 ; G01N1/40

Abstract:
A substrate is provided, which comprises a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, wherein at least two dimensions are between 1 nm and 100 μm, the structured surface being configured to stimulate smooth crystallization of microcrystals or to boost hydrophobic properties. A target plate comprising a plurality of substrates is disclosed as well.
Public/Granted literature
- US20090246470A1 SUBSTRATE AND TARGET PLATE Public/Granted day:2009-10-01
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