Invention Grant
- Patent Title: Image processing apparatus
- Patent Title (中): 图像处理装置
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Application No.: US13882141Application Date: 2011-10-26
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Publication No.: US09183622B2Publication Date: 2015-11-10
- Inventor: Yasutaka Toyoda , Norio Hasegawa , Ryoichi Matsuoka , Atsuko Yamaguchi
- Applicant: Yasutaka Toyoda , Norio Hasegawa , Ryoichi Matsuoka , Atsuko Yamaguchi
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-240254 20101027
- International Application: PCT/JP2011/074662 WO 20111026
- International Announcement: WO2012/057198 WO 20120503
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00 ; H01J37/22 ; H01J37/28 ; G01N21/00 ; H01L21/66

Abstract:
An object of the present invention is to provide an image processing apparatus and a computer program which detects a defect such as a scum at high speed and with high precision. In order to accomplish the above-described object, the present invention proposes an image processing apparatus and a computer program which acquires image data, and detects edge branch points from this image data. Here, at each of the edge branch points, an edge associated therewith branches off in at least three or more directions. According to this configuration, it becomes possible to detect a defect such as a scum without utilizing the reference-pattern image. As a consequence, it becomes possible to detect the scum at high speed and with high precision.
Public/Granted literature
- US20130279793A1 IMAGE PROCESSING APPARATUS AND COMPUTER PROGRAM Public/Granted day:2013-10-24
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