Invention Grant
US09185788B2 Method and system for controlling convection within a plasma cell
有权
用于控制等离子体电池内的对流的方法和系统
- Patent Title: Method and system for controlling convection within a plasma cell
- Patent Title (中): 用于控制等离子体电池内的对流的方法和系统
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Application No.: US14288092Application Date: 2014-05-27
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Publication No.: US09185788B2Publication Date: 2015-11-10
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J65/04
- IPC: H01J65/04 ; H05H1/24 ; H01J61/30

Abstract:
A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The plasma cell also includes a top flow control element disposed above the plasma generation, which includes an internal channel configured to direct a plume of the plasma upward, and a bottom flow control element disposed below the plasma generation region, which includes an internal channel configured to direct gas upward toward the plasma generation region. The top flow control element and the bottom flow control element are arranged within the transmission element to form one or more gas return channels for transferring gas from a region above the plasma generation region to a region below the plasma generation region.
Public/Granted literature
- US20150034838A1 Method and System for Controlling Convection within a Plasma Cell Public/Granted day:2015-02-05
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