Invention Grant
- Patent Title: Ultrasonic sensor microarray and method of manufacturing same
- Patent Title (中): 超声波传感器微阵列及其制造方法
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Application No.: US14331295Application Date: 2014-07-15
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Publication No.: US09187316B2Publication Date: 2015-11-17
- Inventor: Sazzadur Chowdhury , Aref Bakhtazad
- Applicant: UNIVERSITY OF WINDSOR
- Applicant Address: CA Windsor
- Assignee: UNIVERSITY OF WINDSOR
- Current Assignee: UNIVERSITY OF WINDSOR
- Current Assignee Address: CA Windsor
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B81C1/00

Abstract:
A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The transducers include silicon device and backing layers joined by a fused benzocyclobutene (BCB) layer which defines the transducer air gap, and which are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a matrix and are activatable to emit and receive reflected beam signals at a frequency of between about 100 to 170 kHz.
Public/Granted literature
- US20150044807A1 Ultrasonic Sensor Microarray and Method of Manufacturing Same Public/Granted day:2015-02-12
Information query
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