公开(公告)号：US09187316B2

公开(公告)日：2015-11-17

申请号：US14331295

申请日：2014-07-15

Applicant: UNIVERSITY OF WINDSOR

Inventor： Sazzadur Chowdhury ,  Aref Bakhtazad

IPC: H01L21/00 ,  B81C1/00

CPC classification number: B81C1/00269 ,  B06B1/0292 ,  H01L2924/1461

Abstract: A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The transducers include silicon device and backing layers joined by a fused benzocyclobutene (BCB) layer which defines the transducer air gap, and which are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a matrix and are activatable to emit and receive reflected beam signals at a frequency of between about 100 to 170 kHz.

Abstract translation: 一种传感器组件，包括一个或多个电容式微加工超声波换能器（CMUT）微阵列模块，其设置有多个单独的换能器。 换能器包括通过限定换能器空气间隙的稠合苯并环丁烯（BCB）层连接的硅装置和背衬层，它们被布置成在双曲抛物面几何中模拟或定向各个换能器。 传感器/传感器被布置成矩阵并且可激活以以大约100至170kHz的频率发射和接收反射的光束信号。

公开(公告)号：US20150044807A1

公开(公告)日：2015-02-12

申请号：US14331295

申请日：2014-07-15

Applicant: UNIVERSITY OF WINDSOR

Inventor： Sazzadur CHOWDHURY ,  Aref Bakhtazad

IPC: B81C1/00

CPC classification number: B81C1/00269 ,  B06B1/0292 ,  H01L2924/1461

Abstract: A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The transducers include silicon device and backing layers joined by a fused benzocyclobutene (BCB) layer which defines the transducer air gap, and which are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a matrix and are activatable to emit and receive reflected beam signals at a frequency of between about 100 to 170 kHz.

Abstract translation: 一种传感器组件，包括一个或多个电容式微加工超声波换能器（CMUT）微阵列模块，其设置有多个单独的换能器。 换能器包括通过限定换能器空气间隙的稠合苯并环丁烯（BCB）层连接的硅装置和背衬层，它们被布置成在双曲抛物面几何中模拟或定向各个换能器。 传感器/传感器被布置成矩阵并且可激活以以大约100至170kHz的频率发射和接收反射的光束信号。