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US09190937B2 Stiction resistant mems device and method of operation 有权
防静电装置及操作方法

Stiction resistant mems device and method of operation
Abstract:
A MEMS device (20) includes a movable element (20) suspended above a substrate (22) by a spring member (34) having a spring constant (104). A spring softening voltage (58) is applied to electrodes (24, 26) facing the movable element (20) during a powered mode (100) to decrease the stiffness of the spring member (34) and thereby increase the sensitivity of the movable element (32) to an input stimulus (46). Upon detection of a stiction condition (112), the spring softening voltage (58) is effectively removed to enable recovery of the movable element (32) from the stiction condition (112). A higher mechanical spring constant (104) yields a stiffer spring (34) having a larger restoring force (122) in the unpowered mode (96) in order to enable recovery from the stiction condition (112). A feedback voltage (56) can be applied to feedback electrodes (28, 30) facing the movable element (32) to provide electrical damping.
Abstract(Chinese):

MEMS器件（20）包括通过具有弹簧常数（104）的弹簧构件（34）悬挂在衬底（22）上方的可移动元件（20）。 在动力模式（100）期间，弹簧软化电压（58）施加到面向可移动元件（20）的电极（24,26），以降低弹簧构件（34）的刚度，从而增加可动元件 （32）到输入激励（46）。 在检测到静态条件（112）时，有效地去除弹簧软化电压（58），以使可移动元件（32）能够从静止状态（112）恢复。 更高的机械弹簧常数（104）产生在无动力模式（96）中具有较大恢复力（122）的更硬的弹簧（34），以便能够从静止状态（112）恢复。 可以将反馈电压（56）施加到面向可移动元件（32）的反馈电极（28,30）以提供电阻尼。

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