Invention Grant
US09195152B2 Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
有权
光谱纯度滤光片，光刻设备和制造光谱纯度滤光片的方法
- Patent Title: Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
- Patent Title (中): 光谱纯度滤光片，光刻设备和制造光谱纯度滤光片的方法
-
Application No.: US13119895Application Date: 2009-08-26
-
Publication No.: US09195152B2Publication Date: 2015-11-24
- Inventor: Wouter Anthon Soer , Andrei Mikhailovich Yakunin , Martin Jacobus Johan Jak , Denny Mathew , Hendrik Jan Kettelarij , Fredericus Christiaan Van Den Heuvel , Petrus Elizabeth Maria Kuijpers
- Applicant: Wouter Anthon Soer , Andrei Mikhailovich Yakunin , Martin Jacobus Johan Jak , Denny Mathew , Hendrik Jan Kettelarij , Fredericus Christiaan Van Den Heuvel , Petrus Elizabeth Maria Kuijpers
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2009/006194 WO 20090826
- International Announcement: WO2010/034385 WO 20100401
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03F7/20 ; B82Y10/00 ; G02B5/20 ; G21K1/10
Abstract:
A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation. The spectral purity filter includes a filter part having a plurality of apertures configured to transmit extreme ultraviolet radiation and to suppress transmission of a second type of radiation. Each aperture has been manufactured by an anisotropic etching process.
Public/Granted literature
- US20110164237A1 SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER Public/Granted day:2011-07-07
Information query
