Invention Grant
US09206500B2 Method and apparatus for surface processing of a substrate using an energetic particle beam
有权
使用能量粒子束对衬底进行表面处理的方法和装置
- Patent Title: Method and apparatus for surface processing of a substrate using an energetic particle beam
- Patent Title (中): 使用能量粒子束对衬底进行表面处理的方法和装置
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Application No.: US12212844Application Date: 2008-09-18
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Publication No.: US09206500B2Publication Date: 2015-12-08
- Inventor: Boris Druz , Roger P. Fremgen, Jr. , Alan V. Hayes , Viktor Kanarov , Robert Krause , Ira Reiss , Piero Sferlazzo
- Applicant: Boris Druz , Roger P. Fremgen, Jr. , Alan V. Hayes , Viktor Kanarov , Robert Krause , Ira Reiss , Piero Sferlazzo
- Agency: Wood, Herron & Evans, LLP
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/22 ; H01J37/20 ; H01J37/302 ; H01J37/317
Abstract:
Method and apparatus for processing a substrate with an energetic particle beam. Features on the substrate are oriented relative to the energetic particle beam and the substrate is scanned through the energetic particle beam. The substrate is periodically indexed about its azimuthal axis of symmetry, while shielded from exposure to the energetic particle beam, to reorient the features relative to the major dimension of the beam.
Public/Granted literature
- US20090098306A1 Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam Public/Granted day:2009-04-16
Information query
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