Invention Grant
- Patent Title: Nanostructure device and method for manufacturing nanostructures
- Patent Title (中): 纳米结构器件及其制造方法
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Application No.: US13879617Application Date: 2010-10-18
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Publication No.: US09206532B2Publication Date: 2015-12-08
- Inventor: Mohammad Shafiqul Kabir
- Applicant: Mohammad Shafiqul Kabir
- Applicant Address: SE Göteborg
- Assignee: Smoltek AB
- Current Assignee: Smoltek AB
- Current Assignee Address: SE Göteborg
- Agency: Fish & Richardson P.C.
- International Application: PCT/EP2010/065654 WO 20101018
- International Announcement: WO2012/052051 WO 20120426
- Main IPC: C01B31/02
- IPC: C01B31/02 ; D01F9/127 ; B82Y10/00 ; B82Y30/00 ; B82Y40/00 ; H01L29/06 ; H01L29/16 ; H01L29/41 ; H01L29/775 ; B05D3/10 ; C23C16/44 ; H01L29/20

Abstract:
A method for manufacturing a plurality of nanostructures (101) on a substrate (102). The method comprises the steps of: depositing a bottom layer (103) on an upper surface of the substrate (102), the bottom layer (103) comprising grains having a first average grain size; depositing a catalyst layer (104) on an upper surface of the bottom layer (103), the catalyst layer (104) comprising grains having a second average grain size different from the first average grain size, thereby forming a stack of layers comprising the bottom layer (103) and the catalyst layer (104); heating the stack of layers to a temperature where nanostructures (101) can form; and providing a gas comprising a reactant such that the reactant comes into contact with the catalyst layer (104).
Public/Granted literature
- US20130230736A1 NANOSTRUCTURE DEVICE AND METHOD FOR MANUFACTURING NANOSTRUCTURES Public/Granted day:2013-09-05
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