Invention Grant
- Patent Title: Barrier infrared detectors on lattice mismatch substrates
- Patent Title (中): 栅格红外探测器在晶格失配衬底上
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Application No.: US14178133Application Date: 2014-02-11
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Publication No.: US09214581B2Publication Date: 2015-12-15
- Inventor: Arezou Khoshakhlagh , David Z Ting , Sarath D. Gunapala , Cory J. Hill
- Applicant: California Institute of Technology
- Applicant Address: US CA Pasadena
- Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY
- Current Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY
- Current Assignee Address: US CA Pasadena
- Agency: KPPB LLP
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L31/0352 ; H01L31/0304 ; H01L31/18 ; H01L31/101 ; H01L21/02

Abstract:
Systems and methods of implementing barrier infrared detectors on lattice mismatched substrates are provided. The barrier infrared detector systems combine an active detector structure (e.g., contact/barrier/absorber pairs) with a non-lattice matched substrate through a multi-layered transitional structure that forms a virtual substrate that can be strain balanced with the detector structure. The transitional metamorphic layer may include one or both of at least one graded metamorphic buffer layer or interfacial misfit array (IMF). A further interfacial layer may be interposed within the transitional structure, in some embodiments this interfacial layer includes at least one layer of AlSb.
Public/Granted literature
- US20140225064A1 BARRIER INFRARED DETECTORS ON LATTICE MISMATCH SUBSTRATES Public/Granted day:2014-08-14
Information query
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