Invention Grant
- Patent Title: Dual single-crystal backplate microphone system and method of fabricating same
- Patent Title (中): 双单面背板麦克风系统及其制造方法
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Application No.: US14085307Application Date: 2013-11-20
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Publication No.: US09219963B2Publication Date: 2015-12-22
- Inventor: Kuang L. Yang , Li Chen , Thomas D. Chen
- Applicant: Invensense, Inc.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: IPxLAW GROUP LLP
- Agent Maryam Imam
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R19/00 ; B81C1/00
Abstract:
A dual backplate MEMS microphone system includes a flexible diaphragm sandwiched between two single-crystal silicon backplates. Such a MEMS microphone system may be formed by fabricating each backplate in a separate wafer, and then transferring one backplate from its wafer to the other wafer, to form two separate capacitors with the diaphragm.
Public/Granted literature
- US20140072152A1 Dual Single-Crystal Backplate Microphone System and Method Of Fabricating Same Public/Granted day:2014-03-13
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