公开(公告)号：US20140072152A1

公开(公告)日：2014-03-13

申请号：US14085307

申请日：2013-11-20

Applicant: Invensense, Inc.

Inventor： Kuang L. Yang ,  Li Chen ,  Thomas D. Chen

IPC: H04R19/04

CPC classification number: H04R19/04 ,  B81B2201/0257 ,  B81C1/00182 ,  B81C2201/0194 ,  H04R19/005 ,  H04R2201/003 ,  Y10T29/43 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: A dual backplate MEMS microphone system includes a flexible diaphragm sandwiched between two single-crystal silicon backplates. Such a MEMS microphone system may be formed by fabricating each backplate in a separate wafer, and then transferring one backplate from its wafer to the other wafer, to form two separate capacitors with the diaphragm.

Abstract translation: 双背板MEMS麦克风系统包括夹在两个单晶硅背板之间的柔性隔膜。 这样的MEMS麦克风系统可以通过在单独的晶片中制造每个背板，然后将一个背板从其晶片传送到另一个晶片来形成，以与隔膜形成两个单独的电容器。

公开(公告)号：US20140307909A1

公开(公告)日：2014-10-16

申请号：US13863807

申请日：2013-04-16

Applicant: Invensense, Inc.

Inventor： Jicheng Yang ,  Lee J. Jacobson ,  Sushil Bharatan ,  Thomas D. Chen

IPC: H04R1/08

CPC classification number: H04R19/04 ,  H04R19/005

Abstract: A microphone system has a package with an interior chamber and an inlet aperture for receiving an acoustic signal, and a microphone die having a backplate and a diaphragm. The microphone is positioned within the package interior to form a front volume between the diaphragm and the inlet aperture. Accordingly, the microphone is positioned to form a back volume defined in part by the diaphragm within the interior chamber. The system also has a stop member positioned in the back volume so that the diaphragm is between the stop member and the backplate.

Abstract translation: 麦克风系统具有包括内部腔室和用于接收声学信号的入口孔口，以及具有背板和隔膜的麦克风模具。 麦克风位于包装内部，以形成隔膜和入口孔之间的前部容积。 因此，麦克风被定位成形成由内部室内的隔膜部分限定的后部体积。 系统还具有定位在后部体积中的止动构件，使得隔膜位于止动构件和背板之间。

公开(公告)号：US09338559B2

公开(公告)日：2016-05-10

申请号：US13863807

申请日：2013-04-16

Applicant: Invensense, Inc.

Inventor： Jicheng Yang ,  Lee J. Jacobson ,  Sushil Bharatan ,  Thomas D. Chen

IPC: H04R19/04 ,  H04R19/00

CPC classification number: H04R19/04 ,  H04R19/005

Abstract: A microphone system has a package with an interior chamber and an inlet aperture for receiving an acoustic signal, and a microphone die having a backplate and a diaphragm. The microphone is positioned within the package interior to form a front volume between the diaphragm and the inlet aperture. Accordingly, the microphone is positioned to form a back volume defined in part by the diaphragm within the interior chamber. The system also has a stop member positioned in the back volume so that the diaphragm is between the stop member and the backplate.

Abstract translation: 麦克风系统具有具有内部腔室和用于接收声学信号的入口孔口的包装，以及具有背板和隔膜的麦克风模具。 麦克风位于包装内部，以形成隔膜和入口孔之间的前部容积。 因此，麦克风被定位成形成由内部室内的隔膜部分限定的后部体积。 系统还具有定位在后部体积中的止动构件，使得隔膜位于止动构件和背板之间。

公开(公告)号：US09219963B2

公开(公告)日：2015-12-22

申请号：US14085307

申请日：2013-11-20

Applicant: Invensense, Inc.

Inventor： Kuang L. Yang ,  Li Chen ,  Thomas D. Chen

IPC: H04R19/04 ,  H04R19/00 ,  B81C1/00

CPC classification number: H04R19/04 ,  B81B2201/0257 ,  B81C1/00182 ,  B81C2201/0194 ,  H04R19/005 ,  H04R2201/003 ,  Y10T29/43 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: A dual backplate MEMS microphone system includes a flexible diaphragm sandwiched between two single-crystal silicon backplates. Such a MEMS microphone system may be formed by fabricating each backplate in a separate wafer, and then transferring one backplate from its wafer to the other wafer, to form two separate capacitors with the diaphragm.

Abstract translation: 双背板MEMS麦克风系统包括夹在两个单晶硅背板之间的柔性隔膜。 这样的MEMS麦克风系统可以通过在单独的晶片中制造每个背板，然后将一个背板从其晶片传送到另一个晶片来形成，以与隔膜形成两个单独的电容器。

公开(公告)号：US20150264465A1

公开(公告)日：2015-09-17

申请号：US14726045

申请日：2015-05-29

Applicant: Invensense, Inc.

Inventor： Sushil Bharatan ,  Aleksey S. Khenkin ,  Thomas D. Chen

IPC: H04R1/08

CPC classification number: H04R1/08 ,  H01L2224/48137 ,  H04R7/04 ,  H04R7/20 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003 ,  H04R2225/49

Abstract: A MEMS microphone has a stationary portion with a backplate having a plurality of apertures, and a diaphragm spaced from the backplate and having an outer periphery. As a condenser microphone, the diaphragm and backplate form a variable capacitor. The microphone also has a post extending between, and substantially permanently connected with, both the backplate and the diaphragm, and a set of springs securing the diaphragm to at least one of the post and the stationary portion. The post is positioned to be radially inward of the outer periphery of the diaphragm.

Abstract translation: MEMS麦克风具有固定部分，其具有带有多个孔的背板，以及与背板隔开并具有外周的隔膜。 作为电容麦克风，隔膜和背板形成可变电容器。 麦克风还具有在背板和隔膜两者之间延伸并基本上永久连接的柱，以及一组弹簧，其将隔膜固定到柱和固定部分中的至少一个。 柱位于隔膜的外周的径向内侧。