Invention Grant
- Patent Title: Birefringence measurement of polycrystalline silicon samples or the like
- Patent Title (中): 多晶硅样品的双折射测量等
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Application No.: US14095833Application Date: 2013-12-03
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Publication No.: US09228936B2Publication Date: 2016-01-05
- Inventor: Baoliang Wang
- Applicant: Hinds Instruments, Inc.
- Applicant Address: US OR Hillsboro
- Assignee: Hinds Instruments, Inc.
- Current Assignee: Hinds Instruments, Inc.
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: G01N21/23
- IPC: G01N21/23

Abstract:
A birefringence measurement system includes a lens mounted for selective movement into and out of use in the optical setup so that a wide range of sample types can be handled by the system without reconfiguring the primary components of the optical setup of the system (moving the detector, changing the light source power, etc.) in a manner that would sacrifice the cost effectiveness, efficiency, mechanical reliability and repeatability of measurements for such systems.
Public/Granted literature
- US20150153270A1 Birefringence Measurement of Polycrystalline Silicon Samples or the Like Public/Granted day:2015-06-04
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