Invention Grant
US09228962B2 Adjustable cathodoluminescence detection system and microscope employing such a system
有权
可调式阴极发光检测系统及采用这种系统的显微镜
- Patent Title: Adjustable cathodoluminescence detection system and microscope employing such a system
- Patent Title (中): 可调式阴极发光检测系统及采用这种系统的显微镜
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Application No.: US14540220Application Date: 2014-11-13
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Publication No.: US09228962B2Publication Date: 2016-01-05
- Inventor: Mathieu Kociak , Luiz Fernando Zagonel , Marcel Tence , Stefano Mazzucco
- Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , UNIVERSITE PARIS SUD 11
- Applicant Address: FR Paris FR Orsay
- Assignee: Centre National de la Recherche,Universite Paris Sud 11
- Current Assignee: Centre National de la Recherche,Universite Paris Sud 11
- Current Assignee Address: FR Paris FR Orsay
- Agency: Greer, Burns & Crain, Ltd.
- Priority: FR1054108 20100527
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G01N23/225 ; H01J37/22 ; H01J37/244 ; H01J37/28 ; H01J37/26
Abstract:
A cathodoluminescence detection system is provided, including a source of charged particles arranged to illuminate a sample with a charged particle beam, and an optical path having at least two optical components capable of collecting and conveying light radiation coming from the illuminated sample to an analysis device; each optical component of the optical path is selected so that: the maximum output angle of the optical component is less than or equal to 120% of the maximum acceptance angle of the next optical component; and the diameter of the radiation coming from the optical component in the input plane of the next optical component is less than or equal to 120% of the useful input diameter of the next optical component.
Public/Granted literature
- US20150076364A1 ADJUSTABLE CATHODOLUMINESCENCE DETECTION SYSTEM AND MICROSCOPE EMPLOYING SUCH A SYSTEM Public/Granted day:2015-03-19
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