Invention Grant
US09229220B2 Variable wavelength interference filter, optical module, and optical analysis device
有权
可变波长干涉滤波器，光学模块和光学分析装置
- Patent Title: Variable wavelength interference filter, optical module, and optical analysis device
- Patent Title (中): 可变波长干涉滤波器，光学模块和光学分析装置
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Application No.: US14450815Application Date: 2014-08-04
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Publication No.: US09229220B2Publication Date: 2016-01-05
- Inventor: Akira Sano , Nozomu Hirokubo
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2011-030724 20110216
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G02B26/00 ; G01J3/26 ; G01J3/50 ; G01J3/51 ; H01L27/146
Abstract:
An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other.
Public/Granted literature
- US20140340686A1 VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE Public/Granted day:2014-11-20
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