Invention Grant
- Patent Title: Chemical sensing and/or measuring devices and methods
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Application No.: US14673700Application Date: 2015-03-30
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Publication No.: US09234872B2Publication Date: 2016-01-12
- Inventor: Andrew P. Homyk , Michael D. Henry , Axel Scherer , Sameer Walavalkar
- Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY
- Applicant Address: US CA Pasadena
- Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY
- Current Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY
- Current Assignee Address: US CA Pasadena
- Agency: Steinfl & Bruno LLP
- Main IPC: H01L29/772
- IPC: H01L29/772 ; H01L29/02 ; G01N27/414 ; B82Y10/00 ; H01L29/06 ; H01L29/775 ; H01L29/66 ; B82Y15/00
Abstract:
Methods for fabricating silicon nanowire chemical sensing devices, devices thus obtained, and methods for utilizing devices for sensing and measuring chemical concentration of selected species in a fluid are described. Devices may comprise a metal-oxide-semiconductor field-effect transistor (MOSFET) structure.
Public/Granted literature
- US20150268191A1 CHEMICAL SENSING AND/OR MEASURING DEVICES AND METHODS Public/Granted day:2015-09-24
Information query
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