Invention Grant
US09245714B2 System and method for compressed data transmission in a maskless lithography system
有权
在无掩模光刻系统中压缩数据传输的系统和方法
- Patent Title: System and method for compressed data transmission in a maskless lithography system
- Patent Title (中): 在无掩模光刻系统中压缩数据传输的系统和方法
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Application No.: US14040056Application Date: 2013-09-27
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Publication No.: US09245714B2Publication Date: 2016-01-26
- Inventor: Allen M. Carroll
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/302 ; G01F23/284 ; B82Y10/00 ; B82Y40/00

Abstract:
Compression, transmission and decompression of gray-tone imagery data includes receiving a gray-tone image suitable for printing at least a portion of a pattern onto a substrate by operation of an electron beam lithography system, aggregating sets of lines of the gray-tone image into trilines, sequentially encoding each of the trilines of the gray-tone image by operation of one or more encoders, the one or more encoders equipped with a codebook configured to store a plurality of triline fragments and a write location and transmitting the encoded trilines of the gray-tone image to a set of decoders of the digital pattern generator via a set of data pathways established between the one or more encoders and each of the decoders.
Public/Granted literature
- US20140097362A1 System and Method for Compressed Data Transmission in a Maskless Lithography System Public/Granted day:2014-04-10
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