Invention Grant
- Patent Title: Thinned integrated circuit device and manufacturing process for the same
- Patent Title (中): 薄型集成电路器件及其制造工艺相同
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Application No.: US14484970Application Date: 2014-09-12
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Publication No.: US09252054B2Publication Date: 2016-02-02
- Inventor: Sheng-Tsai Wu , Heng-Chieh Chien , John H. Lau , Yu-Lin Chao , Wei-Chung Lo
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia
- Priority: TW103101039A 20140110
- Main IPC: H01L23/367
- IPC: H01L23/367 ; H01L21/768 ; H01L21/48 ; H01L23/42 ; H01L23/427 ; H01L23/433 ; H01L21/50 ; H01L21/56 ; H01L25/065 ; H01L23/00 ; H01L23/498 ; H01L25/18

Abstract:
A thinned integrated circuit device and manufacturing process for the same are disclosed. The manufacturing process includes forming a through-silicon via (TSV) on a substrate, a first terminal of the TSV is exposed on a first surface of the substrate, disposing a bump on the first surface of the substrate to make the bump electrically connected with the TSV, disposing an integrated circuit chip (IC) on the bump so that a first side of the IC is connected to the bump, disposing a thermal interface material (TIM) layer on a second side of the IC opposite to the first side of the IC, attaching a heat-spreader cap on the IC by the TIM layer, and backgrinding a second surface of the substrate to expose the TSV to the second surface of the substrate while carrying the heat-spreader cap.
Public/Granted literature
- US20150076682A1 THINNED INTEGRATED CIRCUIT DEVICE AND MANUFACTURING PROCESS FOR THE SAME Public/Granted day:2015-03-19
Information query
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