Invention Grant
- Patent Title: Thermally stable volatile precursors
- Patent Title (中): 热稳定的挥发性前体
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Application No.: US13818154Application Date: 2011-08-23
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Publication No.: US09255327B2Publication Date: 2016-02-09
- Inventor: Charles H. Winter , Thomas J. Knisley
- Applicant: Charles H. Winter , Thomas J. Knisley
- Applicant Address: US MI Detroit
- Assignee: Wayne State University
- Current Assignee: Wayne State University
- Current Assignee Address: US MI Detroit
- Agency: Brooks Kushman P.C.
- International Application: PCT/US2011/048792 WO 20110823
- International Announcement: WO2012/027357 WO 20120301
- Main IPC: C07F15/06
- IPC: C07F15/06 ; C23C16/34 ; B05D3/10 ; C07F11/00 ; C07F13/00 ; C07F15/02 ; C07F15/04
Abstract:
A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
Public/Granted literature
- US20130164456A1 THERMALLY STABLE VOLATILE PRECURSORS Public/Granted day:2013-06-27
Information query
