Invention Grant
US09255845B2 Infrared detecting element, method for manufacturing infrared detecting element, and electronic device
有权
红外线检测元件，红外线检测元件的制造方法以及电子元件
- Patent Title: Infrared detecting element, method for manufacturing infrared detecting element, and electronic device
- Patent Title (中): 红外线检测元件，红外线检测元件的制造方法以及电子元件
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Application No.: US14604076Application Date: 2015-01-23
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Publication No.: US09255845B2Publication Date: 2016-02-09
- Inventor: Kazuyuki Miyashita
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2011-194658 20110907
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01J5/34 ; G01J5/04 ; G01J5/00 ; H01L31/18
Abstract:
An infrared detecting element includes a recessed portion, a supporting section, and an infrared detecting section. A supporting section is located above the recessed portion such that a hollow space stands between the supporting section and the recessed portion. The infrared detecting section is provided on the supporting section and detects infrared rays. The recessed portion is covered with a water repellent film, and the supporting section is made of a material that has high rigidity compared to silicon and silicon oxide.
Public/Granted literature
- US20150136983A1 INFRARED DETECTING ELEMENT, METHOD FOR MANUFACTURING INFRARED DETECTING ELEMENT, AND ELECTRONIC DEVICE Public/Granted day:2015-05-21
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