Invention Grant
US09257261B2 Method for rapid switching between a high current mode and a low current mode in a charged particle beam system 有权
用于在带电粒子束系统中的高电流模式和低电流模式之间快速切换的方法

  • Patent Title: Method for rapid switching between a high current mode and a low current mode in a charged particle beam system
  • Patent Title (中): 用于在带电粒子束系统中的高电流模式和低电流模式之间快速切换的方法
  • Application No.: US13406207
    Application Date: 2012-02-27
  • Publication No.: US09257261B2
    Publication Date: 2016-02-09
  • Inventor: Tom Miller
  • Applicant: Tom Miller
  • Applicant Address: US OR Hillsboro
  • Assignee: FEI Company
  • Current Assignee: FEI Company
  • Current Assignee Address: US OR Hillsboro
  • Agency: Scheinberg & Associates, PC
  • Agent Michael O. Scheinberg
  • Main IPC: H01J37/30
  • IPC: H01J37/30 H01J37/305
Method for rapid switching between a high current mode and a low current mode in a charged particle beam system
Abstract:
A method for rapid switching between operating modes with differing beam currents in a charged particle system is disclosed. Many FIB milling applications require precise positioning of a milled pattern within a region of interest (RoI). This may be accomplished by using fiducial marks near the RoI, wherein the FIB is periodically deflected to image these marks during FIB milling. Any drift of the beam relative to the RoI can then be measured and compensated for, enabling more precise positioning of the FIB milling beam. It is often advantageous to use a lower current FIB for imaging since this may enable higher spatial resolution in the image of the marks. For faster FIB milling, a larger beam current is desired. Thus, for optimization of the FIB milling process, a method for rapidly switching between high and low current operating modes is desirable.
Information query
Patent Agency Ranking
0/0