Invention Grant
- Patent Title: Display panel and manufacturing method thereof
- Patent Title (中): 显示面板及其制造方法
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Application No.: US14340573Application Date: 2014-07-25
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Publication No.: US09257565B2Publication Date: 2016-02-09
- Inventor: Po-Li Shih
- Applicant: Ye Xin Technology Consulting Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Ye Xin Technology Consulting Co., Ltd.
- Current Assignee: Ye Xin Technology Consulting Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Novak Druce Connolly Bove + Quigg LLP
- Priority: TW102126750A 20130725
- Main IPC: H01L21/786
- IPC: H01L21/786 ; H01L29/786 ; H01L29/66 ; H01L21/00

Abstract:
A display panel manufacturing method includes forming a gate electrode on a substrate and a gate insulator, a semiconductor layer, and an etch stop layer covering the gate electrode. A photoresist layer covering on the etch stop layer is pattern from two opposite side of the substrate by two photolithography processes to form a photoresist pattern. The etch stop layer is dry etched to form an etch stop pattern via the photoresist pattern. The photoresist pattern is formed again by two photolithography processes. The semiconductor layer is wet etched to form a semiconductor pattern via the photoresist pattern. A source electrode and a drain electrode is formed corresponding to two opposite sides of the gate electrode to orderly cover the etch pattern, the semiconductor pattern, and the gate insulator.
Public/Granted literature
- US20150031168A1 DISPLAY PANEL AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-01-29
Information query
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