Invention Grant
- Patent Title: Control of multi-temperature micro-oven for MEMS devices
- Patent Title (中): 用于MEMS器件的多温度微波炉的控制
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Application No.: US13878572Application Date: 2011-10-11
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Publication No.: US09257993B2Publication Date: 2016-02-09
- Inventor: Satyakiran N. Munaga , Francky Catthoor
- Applicant: Satyakiran N. Munaga , Francky Catthoor
- Applicant Address: BE Leuven BE Leuven
- Assignee: IMEC,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee: IMEC,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee Address: BE Leuven BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- International Application: PCT/EP2011/067749 WO 20111011
- International Announcement: WO2012/049187 WO 20120419
- Main IPC: H03L1/04
- IPC: H03L1/04 ; H03H9/02 ; H03H9/08

Abstract:
Disclosed are microelectromechanical system (MEMS) devices and methods of using the same. In some embodiments, a MEMS device comprises a micro-oven comprising a MEMS oscillator configured to generate a reference signal. The device further comprises a control unit comprising at least one input node configured to receive a parameter set, where the parameter set comprises at least a first parameter indicative of a sensed ambient temperature, and where the control system is configured to (i) based on the parameter set, select from a plurality of pre-characterized operation temperatures an operation temperature for the MEMS oscillator, and (ii) generate a temperature-setting signal indicating the selected operation temperature. The device still further comprises a temperature control system communicatively coupled to the control unit and configured to (i) receive the temperature-setting signal and (ii) maintain the MEMS oscillator at the selected operation temperature.
Public/Granted literature
- US20130222073A1 Design and Control of Multi-Temperature Micro-Oven for MEMS Devices Public/Granted day:2013-08-29
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