Invention Grant
- Patent Title: Target processing unit
- Patent Title (中): 目标处理单元
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Application No.: US14479648Application Date: 2014-09-08
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Publication No.: US09263234B2Publication Date: 2016-02-16
- Inventor: Johan Joost Koning , David Johannes van den Bergen
- Applicant: Mapper Lithography IP B.V.
- Applicant Address: NL Delft
- Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee Address: NL Delft
- Agency: Hoyng Rokh Monegier LLP
- Agent David P. Owen
- Main IPC: H01J37/10
- IPC: H01J37/10 ; H01J37/30 ; G03F7/20 ; H01J37/20 ; H01J37/317 ; B01J19/12

Abstract:
The invention relates to a projection lens assembly for directing a beam toward a target. This assembly includes a lens support body (52) that spans a plane (P), and has a connection region (58) and a lateral edge (56). The lens support body is arranged for insertion into a frame (42) of a processing unit along an insertion direction (X) parallel with the plane (P). The projection lens assembly includes conduits (60-64) emanating from the connection region, and a conduit guiding body (70-81) for accommodating the conduits. The guiding body includes a first guiding portion (72) for guiding the conduits from the connection region, along the plane to a lateral region (B) beyond the lateral edge. The guiding body also includes a second guiding portion (78) for guiding the conduits from the lateral region (B) toward a tilted edge (79) of the conduit guiding body.
Public/Granted literature
- US20150090895A1 TARGET PROCESSING UNIT Public/Granted day:2015-04-02
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