Invention Grant
- Patent Title: Electromagnetic waveguide and plasma source
- Patent Title (中): 电磁波导和等离子体源
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Application No.: US13955193Application Date: 2013-07-31
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Publication No.: US09265138B2Publication Date: 2016-02-16
- Inventor: Michael Ron Hammer , John Pillans , Thomas Erwin Preuss
- Applicant: AGILENT TECHNOLOGIES, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J17/04
- IPC: H01J17/04 ; H05H1/30
Abstract:
A method comprises: aligning a plasma torch within an iris cavity of an iris along a first axis between first and second iris slots having heights less than 70% of the diameter of the torch; and generating an electromagnetic field having field lines along a second axis. The field comprises a component that is substantially transverse to the first direction. An apparatus is also described.
Public/Granted literature
- US20140062299A1 ELECTROMAGNETIC WAVEGUIDE AND PLASMA SOURCE Public/Granted day:2014-03-06
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