Invention Grant
- Patent Title: Apparatus and method for coating organic film
-
Application No.: US14708786Application Date: 2015-05-11
-
Publication No.: US09273390B2Publication Date: 2016-03-01
- Inventor: Wulin Shen , Chunsheng Jiang , Qing Dai , Haijing Chen , Guangcai Yuan , Jingang Fang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., Ltd.
- Current Assignee: BOE TECHNOLOGY GROUP CO., Ltd.
- Current Assignee Address: CN Beijing
- Priority: CN201310231659 20130609
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/50 ; C23C14/30 ; C23C14/12 ; C23C14/24 ; B05B5/00 ; B05B5/03 ; B05B5/053 ; B05D1/00 ; H01L51/00 ; H01L51/56 ; C23C14/04

Abstract:
An apparatus and method for coating an organic film are disclosed. The apparatus comprises an evaporation device, an electron emission device and a spray device; wherein the evaporation device comprises an evaporation container, the evaporation container is a linear evaporation container, in which a uniform organic gas is generated; the electron emission device is horizontally arranged over the evaporation container such that the organic gas evaporated in the evaporation container is uniformly charged and becomes charged organic gas; the spray device is provided with an electric field, under which the charged organic gas is moved toward a substrate so as to deposit the organic film on the substrate.
Public/Granted literature
- US20150240345A1 APPARATUS AND METHOD FOR COATING ORGANIC FILM Public/Granted day:2015-08-27
Information query
IPC分类: