Invention Grant
- Patent Title: Infrared sensor device and method for producing an infrared sensor device
- Patent Title (中): 红外线传感器装置及其制造方法
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Application No.: US14400691Application Date: 2013-04-12
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Publication No.: US09276146B2Publication Date: 2016-03-01
- Inventor: Ingo Herrmann , Christoph Schelling
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102012208192 20120516
- International Application: PCT/EP2013/057693 WO 20130412
- International Announcement: WO2013/171010 WO 20131121
- Main IPC: H01L31/0352
- IPC: H01L31/0352 ; G01J5/20 ; H01L27/146 ; H01L31/103 ; G01J5/04 ; G01J5/02 ; H01L27/144 ; H01L31/02 ; H01L31/028 ; H01L31/18

Abstract:
An infrared sensor device includes at least one sensor element formed in a semiconductor substrate, an SOI wafer that defines a gap below and around the sensor element, and a suspension device that is configured to suspend the sensor element in the SOI wafer. The sensor element is substantially arranged below the suspension device, thereby achieving a high sensitivity, low thermal capacity, low thermal coupling to the substrate and a high image refresh rate.
Public/Granted literature
- US20150102443A1 Infrared Sensor Device and Method for Producing an Infrared Sensor Device Public/Granted day:2015-04-16
Information query
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